METHOD AND INSTRUMENT FOR MEASURING SPHERICAL SURFACE

摘要

PROBLEM TO BE SOLVED: To accurately measure the spherical surface of an optical element by pressing against an optical element by securing the profile movement of a probe and an optical element. SOLUTION: This device is equipped with a measuring jig 5 which is integrated with the probe 4 coming into contact with the optical element 1 and abuts against the optical element 1 and a vibration applying means 15 which applies vibration directly or indirectly to the optical element 1 and/or measuring jig 5 so that the optical element 1 and measuring jig 5 follow when the spherical surface 1a of the optical element 1 is measured. The measuring jig 5 is held tiltably on a housing 9 through a spherical bearing 6 and the housing 9 is able to move horizontally and vertically by abutting against the measuring jig 5 and optical element 1. The measuring jig 5 and optical element 1 can be placed in excellent profile movement.