发明名称 |
Oxynitride gate dielectric, especially for a semiconductor memory device, produced by silicon substrate reaction or CVD to form an oxynitride layer and back-oxidation to form an intermediate silicon dioxide layer |
摘要 |
Oxynitride gate dielectric formation comprises oxynitride layer formation on a silicon substrate by reaction or CVD and back-oxidation to form an intermediate silicon dioxide layer. Oxynitride gate dielectric formation in a semiconductor device comprises: (a) contacting the upper surface of a silicon substrate with a nitrogen- and/or oxygen-containing gas at >= 500 deg C to form an oxynitride layer; and (b) contacting the substrate and the layer with an oxygen- and halogen compound-containing gas to form a silicon dioxide layer between the oxynitride layer and the substrate. Independent claims are also included for the following: (i) a similar process in which the oxynitride layer is formed by CVD; (ii) a gate dielectric in a semiconductor device, comprising a SiO2 spacer layer between a silicon substrate and an oxynitride layer; and (iii) a gate stack in a semiconductor device, comprising a silicon substrate bearing a sequence of a SiO2 spacer layer, an oxynitride layer, a SiO2 layer and a conductive gate.
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申请公布号 |
DE19963674(A1) |
申请公布日期 |
2000.07.20 |
申请号 |
DE19991063674 |
申请日期 |
1999.12.29 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK |
发明人 |
BUCHMANN, DOUGLAS;COPEL, MATTHEW;VAREKAMP, PATRICK RONALD |
分类号 |
H01L29/78;H01L21/28;H01L21/283;H01L21/318;H01L29/51;(IPC1-7):H01L21/336 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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