| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device capable of effectively restraining swinging of a vibration resistant stand by reaction of acceleration/deceleration of a stage. SOLUTION: An accelerating signal is outputted to an accelerating/ decelerating device 9 by a control device 8 on the basis of this input information only by inputting a target moving distance of a stage 4 as the input information from an input device 11, and a decelerating signal having the same waveform as the accelerating signal and being inverse in the direction is outputted after n×T seconds after outputting the accelerating signal.
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