| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect the position of a mark from an input image, by minimizing the effects due to change in the luminance distribution of the input image, and deformation of the mark. SOLUTION: The position detection apparatus for detecting the position of a mark that approximates a template image has a calculation processing section 30. The calculation processing section 30 has a phase difference calculating means 42 for calculating the phase constituent difference between a phase constituent, when the template image is converted to a frequency constituent with a specific position in the template image as a reference, and that when the input image is converted to the frequency constituent with a specific position in the input image as the reference for each frequency, and a mark position detection means 50 for detecting the position of the mark in the input image, based on a phase impulse response function, where the phase constituent difference calculated by the phase difference calculation means 42 is converted. |
