Wafer loading device

摘要

A wafer loading device having improved lift-pin structure is provided to solve the particle clogging problems. The wafer loading device includes a pedestal with a plurality of holes for allowing the lift pins to move in vertical direction. The structure of the lift pins includes a neck portion connecting a head portion and a support portion. The neck portion is narrower than the support portion for leaving a gap in the hole. The lift ring is driven by a lift driver and disposed beneath the pedestal for controlling the movement of the lift pins.