| 摘要 |
PROBLEM TO BE SOLVED: To examine the function of a sampling pump or leakage of a flow path without using a pressure sensor. SOLUTION: A light interference type fluid characteristics measuring apparatus in which a measuring chamber 1 into which a gas to be examined flows, reference chambers 2, 3 in which a standard gas is sealed are installed parallel to measure fluid characteristics based on a displacement of an interference fringe of a light which passes through the measuring chambers and the reference chambers, is provided with a solenoid valve 5 for sealing the flow path of the gas of the chamber 1, and a pressure examining means 21 for detecting the moving amount of the interference fringe during the period for sealing the flow path. COPYRIGHT: (C)2003,JPO
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