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发明名称
HIKARIKENCHISOCHI
摘要
申请公布号
JPS5165660(A)
申请公布日期
1976.06.07
申请号
JP19740139159
申请日期
1974.12.03
申请人
FUJITSU LTD
发明人
ISHIDA SACHOSHI;MYAMOTO KEIZO
分类号
G01C1/00;G01N21/88;G01S3/78;G01S3/784;H01L27/14;H01L31/10
主分类号
G01C1/00
代理机构
代理人
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