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发明名称
SENTAKUTEKITAKOSHITSUHANDOTAINO KEISEIHOHO
摘要
申请公布号
JPS5197980(A)
申请公布日期
1976.08.28
申请号
JP19750023091
申请日期
1975.02.25
申请人
发明人
分类号
H01L21/76;H01L21/3063
主分类号
H01L21/76
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代理人
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