APPARATUS AND PROCESS FOR PLASMA TREATMENT,申请号GB19760041345-传众专利搜索

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发明名称	APPARATUS AND PROCESS FOR PLASMA TREATMENT
摘要
申请公布号	GB1550853(A)	申请公布日期	1979.08.22
申请号	GB19760041345	申请日期	1976.10.05
申请人		发明人
分类号	B01J15/00;C23C16/513;C23C16/54;H01J37/32;H05H1/30;(IPC1-7):H01J37/02;H05H1/26;H05H1/18	主分类号	B01J15/00
代理机构		代理人
主权项
地址

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