DEVICE FOR INSPECTING WAFER APPEARANCE,申请号JP19850165771-传众专利搜索

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发明名称	DEVICE FOR INSPECTING WAFER APPEARANCE
摘要
申请公布号	JPS6144439(A)	申请公布日期	1986.03.04
申请号	JP19850165771	申请日期	1985.07.29
申请人	HITACHI LTD	发明人	SASAKI TAMOTSU
分类号	H01L21/66;H01L21/67;H01L21/68	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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