| 摘要 |
PURPOSE:To quickly execute the discharge of an already processed substrate and the supply of an unprocessed substrate and to efficiently process the unprocessed substrate with 2 laser beams by intermittently rotating a turntable at every prescribed angle. CONSTITUTION:The turntable 1 intermittently rotates at every 180 deg.. A switching device 3 successively executes the discharge of the already processed substrate 4b from switching positions C, D and the supply of the unprocessed substrate 4a to the switching positions C, D during the stop time of the turntable 1. The unprocessed substrate 4a previously transferred to processing positions A, B is subjected to laser beam processing in respective beam irradiation parts 2a, 2b of a laser beam irradiating device 2 during the operation time for the above- mentioned switching. |
