PELLICLE ADHESIVE REMOVAL DEVICE AND PELLICLE ADHESIVE REMOVAL METHOD

摘要

PROBLEM TO BE SOLVED: To provide a pellicle adhesive removal device and a pellicle adhesive removal method, allowing effective removal of pellicle adhesive remaining on a photomask without needing a large amount of fluid while preventing contamination to the photomask.SOLUTION: A pellicle adhesive removal device includes: a photomask holding mechanism for holding a photomask; a tape pressing mechanism for pressing a back side of an adhesive removal tape towards a pressure body to make a main face of the adhesive removal tape have contact with a location where the pellicle adhesive of the photomask remains; a tape supply mechanism for supplying the adhesive removal tape; and a tape recovery mechanism for recovering the adhesive removal tape. The pellicle adhesive removal device is used to adhere the pellicle adhesive onto the adhesive removal tape impregnating chemicals for removal and to remove the adhesive from the photomask.SELECTED DRAWING: Figure 1