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发明名称
MANUFACTURE OF PHASE-SHIFT DIFFRACTION GRATING
摘要
申请公布号
JPH02220489(A)
申请公布日期
1990.09.03
申请号
JP19890042476
申请日期
1989.02.21
申请人
MITSUBISHI ELECTRIC CORP
发明人
KIMURA TATSUYA
分类号
G02B5/18;G03F7/20;H01S5/00
主分类号
G02B5/18
代理机构
代理人
主权项
地址
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