| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect residual vibration after interference between vibration generated from a vibration body and control vibration generated from a control vibration source by a load sensor. SOLUTION: A circular recessed part 10d is formed in the central part of the bottom 10a of a yoke 10A protruded from the outside of a case 40, an annular recessed part 10e is formed in a peripheral edge part, and a cylindrical rise part 10f is formed at the outside of the annular recessed part 10e. A cover member 48 made of iron is fixed at the bottom 10a. A rise part 48a is formed at the peripheral edge of a cover member 48, In a state that a flange part 48b formed at the end part of the rise part 48a is brought into contact with the bottom of the annular recessed part 10e, a rise part 10f is caulked to the inside and the flange part 48b is fixed in the annular recessed part 10e. A load sensor 22 is nipped between the bottom 10a and the cover member 48 in a manner to be positioned at the central part of a gap 49 provided between the bottom 10a of the yoke 10A and the cover member 48. The detecting result of the load sensor 22 is outputted as a residual vibration signal. |
