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发明名称
ULTRAVIOLET-RAY IRRADIATION APPARATUS
摘要
申请公布号
JPH03278860(A)
申请公布日期
1991.12.10
申请号
JP19900082297
申请日期
1990.03.29
申请人
TOSHIBA LIGHTING & TECHNOL CORP
发明人
MIWA HIROYUKI;FUCHIWAKI TSUTOMU;KAWANAMI TAKASHI
分类号
B05D3/06;H01L21/027;H05K3/28;H05K7/20
主分类号
B05D3/06
代理机构
代理人
主权项
地址
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