申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
TAKAMIZAWA, MINORU, JOETSU, NIIGATA, JP;KOBAYASHI, TAISHI, JOETSU, NIIGATA, JP;HAYASHIDA, AKIRA, JOETSU, NIIGATA, JP;TAKEDA, YOSHIHUMI, JOETSU, NIIGATA, JP;HONGU, TATSUHIKO, YOKOHAMA, KANAGAWA, JP |