Volumetric flow sensor with linear characteristic

摘要

The flow sensor has a measuring chamber (1) divided into two partial chambers (1a,1b), coupled together via a capillary and respectively provided with a gas inlet (2) and a gas outlet (4). A reference chamber (3) lies adjacent both partial chambers, separated from each of the latter via a membrane (5), provided with a number of expansion strips (7) connected in a bridge circuit in alignment with the partial chamber with the gas outlet.