| 摘要 |
PROBLEM TO BE SOLVED: To increase tolerance by precession and prevent damage to vibration and provide a shaft seal supporting base having current reflux mechanism keeping reliability for long time. SOLUTION: This shaft seal supporting base is comprised of a casing 2 having a mounting part 8 to vacuum chamber wall and an axis of rotation 14, which is rotatably supported by bearings 13, 15, 17 in the casing 2, whose one axis side is projected to the side of the vacuum chamber and another axis side be projected to that of atmosphere, which is shaft-sealed. The shaft seal supporting base is also comprised of a sample base 1 mounted at one end of the projected axis 14 of the side of the vacuum chamber, a connection part with a driving part which is mounted at near another end of the axis 14, a liquid contact 9 to be pressed to the center of the axis 14 by an elastic plate 7 and a connection line 6 conducting between the plate 7 and the casing 2.
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