| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear motor drive device which can prevent fine particles, particularly iron particles, entering the device with air through small gaps of dust-proof covers from being attracted by the magnet parts of the linear motor. SOLUTION: A feed mechanism employing linear motors has a linear guide rail 2 along which a moving table 7 can be driven to move linearly by the linear motors 5 and 6 and corrugated covers 8a and 8b covering at least the portions of the linear motors 5 and 6. Magnets 11 which attract fine particles penetrating through gaps formed by the corrugated covers 8a and 8b are arranged around the gaps. With this constitution, iron particles in air can be attracted by the magnets 11 immediately before entering insides of the corrugated covers 8a and 8b, so that the adhesion of the iron particles to the armatures and magnets of the linear motors can be avoided.
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