| 摘要 |
PROBLEM TO BE SOLVED: To make a heat treating device controllable in the optimum state in accordance with the contents of the treatment performed by means of a heating source. SOLUTION: A substrate W is placed on a hot plate 20 for heat treatment. The temperature of the plate 20 is measured by means of a temperature sensor 25. A temperature control section 15 makes PID control on the temperature of the plate 20 based on the result of the measurement by means of the sensor 25. A PID constant deciding section 16 decides the PID constant for the PID control performed by means of the control section 15. The PID constant decided by means of the deciding section 16 varies depending upon that whether the hot plate 20 actually treats the substrate W or the set temperature of the plate 20 is changed and, even when the set temperature is changed, in addition, depending upon the changed temperature width or temperature zone.
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