发明名称 Optical element housing or mounting connector
摘要 An optical element housing or mounting connector (4), in particular for lens elements (13) in lens systems (12) for semi-conductor-lithography projection printing machines, is provided with electro-permanent magnets (1), the electro-permanent magnets being magnetized by the magnetic field of a coil (5) connected to an activating device (8) in such a way that the housings or mountings (4) are connected to one another by magnetic forces.
申请公布号 US6445515(B2) 申请公布日期 2002.09.03
申请号 US20010839958 申请日期 2001.04.19
申请人 CARL-ZEISS-STIFTUNG 发明人 MOENNIG THOMAS
分类号 G02B7/02;G02B27/62;G03F7/20;H01L21/027;(IPC1-7):G02B7/02 主分类号 G02B7/02
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