Inkjet recording head, recording apparatus including the inkjet recording head, and method for manufacturing the inkjet recording head

摘要

An inkjet recording head and an apparatus including the inkjet recording head are provided for expelling a fine ink drop which is less than or equal to 1 pico-liter (pl). The inkjet recording head has a substrate having a heater for ejecting an ink drop, and an ink feed inlet formed thereon; a barrier layer having an ink passage which communicates the ink feed inlet with the heater; and an orifice plate having an ink nozzle formed facing the heater, the ink nozzle communicating with the ink passage. The barrier layer is made from a negative photosensitive resin. The orifice plate includes a metallic thin film having a thickness in a range of about 0.1 to 2.0 mum.