| 摘要 |
PURPOSE: A blade of a wafer transfer robot is provided to prevent a processing error due to a loading error by loading a wafer on a correct position. CONSTITUTION: A blade of a wafer transfer robot includes a substrate(110), a rear shoe(120), a front shoe(130), and a loading position control portion. The substrate is coupled to a robot arm(200) to be operated according to a predetermined program. The rear shoe and the front shoe are formed on the upper surface of the substrate in order to form a pocket for receiving the substrate. The loading position control portion is installed at an upper portion of the rear shoe. The loading position control portion controls the loading position of the wafer by pushing a wafer loaded on the upper portion of the rear shoe toward a pocket. The loading position control portion is formed with a sliding pusher(140).
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