THERMAL FLOW RATE SENSOR AND LIGHT SUPPLY METHOD

摘要

PROBLEM TO BE SOLVED: To solve the problem that catalytic action is not fully demonstrated to change thermal diffusion from a heating resistor when light does not reach the surface of a photocatalyst film if an oil sticks to at a speed beyond the process capability of the photocatalyst film to shield the light. SOLUTION: A light emitting means is provided on the rear surface side of the photocatalyst film. Light penetrates the photocatalyst film from the rear surface side and reaches the front surface of the photocatalyst film. Since the light which has penetrated from the rear surface side activates the front surface of the photocatalyst film, the oil sticking to the front surface is decomposed/removed. COPYRIGHT: (C)2003,JPO