| 摘要 |
PURPOSE:To prevent floating particles in air from adhering by treating the whole components of an air filter apparatus such as channel frames, air filter modules, etc., made of aluminum and placed in the ceiling of a clean room to make electrically conductive. CONSTITUTION:The title filter apparatus is composed of channel parts 2a, 2b having U-shape grooves, a channel frame 1 comprised of joints 3a-3c having U-shape groove cross section for connecting the channel parts in lattice pattern and hanging them with hanging fittings, a sealing agent 20 to fill the grooves of the frame 1, and an air filter module 40 to be fixed in the open parts of the lattice pattern of the frame 1. The module 40 is composed of a frame 42 having a skirt part 48 in contact with the bottom parts of the grooves of the frame 1, a filter material 50 positioned in the inside of the frame 42, and protective parts 52, 54 covering the up side and down side of the filter material 50. The frame 42 and protective parts 52, 54 are made of an Al material and the surfaces of them are treated to be electrically conductive. |
