| 摘要 |
PROBLEM TO BE SOLVED: To provide a gyro module capable of reducing decrease in detection accuracy for an angular speed due to external application of acceleration.SOLUTION: A gyro module 1 includes a gyro sensor 5 having a gyro sensor element 10 included in a package 20, a substrate 30, and a support body 40 adhering the gyro sensor 5 to the substrate 30. The support body 40, in a plan view along a direction (Z axis direction) orthogonal to an adhesion surface 31 of the substrate 30, is disposed within a range that is a part of an area where the gyro sensor 5 overlaps the substrate 30, and that includes the gravity center G of the gyro sensor 5; and the support body has a Young's modulus of larger than 0 and equal to or smaller than 1 GPa. A clearance C is present between the gyro sensor 5 and the substrate 30 in a periphery of the support body 40.SELECTED DRAWING: Figure 2 |
