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发明名称
IC MOUNTING EQUIPMENT
摘要
申请公布号
JPH07201931(A)
申请公布日期
1995.08.04
申请号
JP19930335041
申请日期
1993.12.28
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
ANDO TAKEO;KABESHITA AKIRA;MURATA TAKAHIKO
分类号
H01L21/60;H01L21/603;(IPC1-7):H01L21/603
主分类号
H01L21/60
代理机构
代理人
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地址
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