发明名称 |
Crucible for preparing compound semiconductor crystal |
摘要 |
A method of preparing a compound semiconductor crystal in a crucible involves first forming a boron or boron compound containing layer on an inner surface of the crucible and heat treating the same to form a B2O3 containing layer. The resulting preheated crucible is then employed for preparing the compound semiconductor crystal. By pretreating the crucible in this manner, it is possible to previously form a homogenous B2O3 film on the crucible interior surface while preventing incomplete and heterogeneous coating of the B2O3 film. Consequently, it is possible to prevent a raw material melt from wetting the crucible interior surface and thus to suppress polycrystallization, thereby preparing a compound semiconductor single crystal with an excellent yield.
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申请公布号 |
US5656077(A) |
申请公布日期 |
1997.08.12 |
申请号 |
US19950503702 |
申请日期 |
1995.07.18 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, CO., LTD. |
发明人 |
KAWASE, TOMOHIRO |
分类号 |
C30B11/00;(IPC1-7):C30B35/00 |
主分类号 |
C30B11/00 |
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