ANALYZER AND ANALYSIS METHOD FOR ANALYZING STATE CHANGE OF THIN FILM INCLUDING FINE PARTICLE

摘要

PROBLEM TO BE SOLVED: To provide an analyzer capable of analyzing the state change of a thin film including fine particles in a non-contact/non-invasion manner.SOLUTION: An analyzer for analyzing the state change of a thin film including fine particles comprises: OCT means for interfering scattered reflection light including a dynamic speckle obtained by irradiating a thin film with irradiation light having a broadband with reference light to generate interference light; an intensity distribution data generating unit 52 for calculating an intensity distribution in the space-time region of the interference light; a calculation unit 54 for calculating the auto-correlation function and correlation time of an interference light intensity using the intensity distribution data; a phase distribution data generating unit 53 for calculating the phase distribution of the space-time region from the phase of the interference light; and a phase analysis unit 55 for performing a phase-analysis of the shape change of the thin film using the phase distribution data of the space-time region. The viscosity of the thin film can be analyzed by the correlation time, and the variation of thickness can be analyzed by the phase analysis with high accuracy.SELECTED DRAWING: Figure 4