发明名称 Regression calibrated spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system
摘要 A Spectroscopic Rotating Compensator Material System Investigation System including a Dual Waveplate Pseudo-Achromatic Compensator System, and a Photo-Array for simultaneously detecting a Multiplicity of Wavelengths, is disclosed. The Spectroscopic Rotating Compensator Material System Investigation System is calibrated by a Mathematical Regression based technique involving, where desirable, Parameterization of Calibration Parameters. Calibration is possible utilizing various dimensional Data Set(s) obtained with the Spectroscopic Rotating Compensator Material System Investigation System in a "Material System present" or in a Straight-through" configuration, said data sets being variously normalized to D.C., A.C. or combination D.C. and A.C. components thereof.
申请公布号 US6353477(B1) 申请公布日期 2002.03.05
申请号 US20000496011 申请日期 2000.02.01
申请人 J. A. WOOLLAM CO. INC. 发明人 JOHS BLAINE D.;HERZINGER CRAIG M.
分类号 G01J3/28;G01J3/447;G01J4/00;G01N21/21;G02B5/30;G02B27/46;(IPC1-7):G01N21/21 主分类号 G01J3/28
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