COATING APPARATUS

摘要

PURPOSE: To provide a coating apparatus preventing the supply amount of a coating liquid from becoming insufficient or excessive at the start time of coating. CONSTITUTION: Piping 24 is connected to a pump 2 by a joint 25 and a filter 26 is provided on the way of the piping 24. The piping 24 is constituted of a material of which the deformation is negligible even if the internal pressure of the piping becomes high by the contamination of the filter 26, for example, a metal such as stainless steel or the like or a resin such as polyphenylene sulfide(PPS) or the like.