发明名称 Thin film transistor with electrode on one side of a trench
摘要 A thin film transistor and a fabrication method thereof in which a desired device characteristic is achieved by adjusting the lengths of a channel region and an offset region. The transistor includes a substrate in which a trench is formed, a gate electrode formed in one side in the interior of the trench, a gate insulation film formed in the substrate including the gate electrode, an active layer formed on the gate insulation film, and impurity regions formed on the active layer corresponding to the substrate. The length of the channel and offset regions are adjusted by adjusting the length and width of the trench within the substrate.
申请公布号 US6373080(B1) 申请公布日期 2002.04.16
申请号 US20000717126 申请日期 2000.11.22
申请人 HYNIX SEMICONDUCTOR, INC. 发明人 GIL GYOUNG-SEON
分类号 H01L21/336;H01L29/786;(IPC1-7):H01L27/148;H01L29/768;H01L29/76;H01L29/94 主分类号 H01L21/336
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