| 摘要 |
PROBLEM TO BE SOLVED: To provide a transducer capable of being used under the condition of corrosive vapors, and to provide a manufacturing method. SOLUTION: The pressure sensor 10 is composed of an upper substrate 30 which includes a detecting surface 30A on one side face, a diaphragm 20 which is disposed at the detecting surface 30A of the upper substrate 30 through a clearance so as to be able to move in relation to the upper substrate 30, a fixed electrode 31 which is disposed at the detecting surface 30A of the upper substrate 30, and a first signal terminal 22 which is electrically connected to the diaphragm 20. At least a portion of the first signal terminal 22 has at least two layers, and the lower layer is made up of aluminum having a good ohmic contact in electric connection with silicon forming the diaphragm 20, and the upper layer is made up of titanium having superior resistance to corrosion.
|
