| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room material evaluation device and an evaluation method of the clean room material, which can carry out quantitative and effective evaluation. SOLUTION: The clean room material evaluation device has a first member 1 for securing a clean room material 3 and a planar second member 2, having a plurality of hole parts 21. The first member 1 and/or the second member 2 are moved, so that the second member 2 applies impact to the clean room material 3 secured to the first member 1. If the clean room material 3 contains liquid, it is preferable that the second member 2 have a plurality of groove parts 22.
|
