| 摘要 |
PURPOSE: A three-axis stage driving device using a linear driver having a solenoid and a permanent magnet is provided, to prepare the driving device simply and to enable it to be operated without another amplifier, and which drives the three-axis position by controlling z-Rx-Ry axes by using the intensity of changing magnetic flux inside the constant flux flow. CONSTITUTION: The three-axis stage driving device(10) comprises a three-axis stage fixing plate(11); a three-axis movement driving plate(12) plated the upper plate of the fixing plate; and a plurality of linear drivers(20A, 20B, 20C) which are arranged at the position corresponding to the triangular point and is placed between the three-axis fixing plate and the three-axis movement driving plate. The linear drivers(20A, 20B, 20C) comprises an upper yoke; an lower yoke; an operation axis which is placed between the two yokes and delivers the movement direction to the three-axis movement driving plate; inner and outer yokes placed on the circumference of the operation axis between the upper and lower yokes, with a certain distance; upper and lower coils which are inserted between the inner and outer yokes, are placed with a certain distance with the upper and lower yokes, and receives the current; a permanent magnet placed between the upper and lower coils; and upper and lower supporting plate for guide which supports the operation axis, guides the movement of the operation axis, removes the rotation of Rz-direction, and is support-connected with at least one of the upper and lower yokes to enable it to be tilted. |
