| 摘要 |
PROBLEM TO BE SOLVED: To provide a valve of a vacuum device having a long lifetime, including less particles, and furnished with sealing surfaces on both sides. SOLUTION: The valve 3 of the vacuum device is installed in the horizontal direction between a left 1 and a right vacuum chamber 2 and is composed of a valve seat 20 having a left 21 and a right communication opening 22, a valve body V movable in the axial direction of the valve seat 20 and also capable of rotating, and a drive part 5 to move the valve body V in the axial direction and rotate. COPYRIGHT: (C)2003,JPO
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