申请人 |
ASML NETHERLANDS B.V. |
发明人 |
BIJLAART, ERIK THEODORUS MARIA;HOOGENDAM, CHRISTIAAN ALEXANDER;LOOPSTRA, ERIK ROELOF;MERTENS, JEROEN, JOHANNES, SOPHIA, MARIA;MULKENS, JOHANNES CATHARINUS HUBERTUS;SLAGHEKKE, BERNARDUS, ANTONIUS;STREEFKERK, BOB;TINNEMANS, PATRICIUS, ALOYSIUS, JACOBUS;VANSANTEN, HELMAR;KOLESNYCHENKO, ALEKSEY YURIEVICH |