| 发明名称 |
Depositing an oxide |
| 摘要 |
A dielectric deposited on a substrate may be exposed to a salt solution. While exposed to the salt solution, an oxide is deposited on the dielectric.
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| 申请公布号 |
US2005095792(A1) |
申请公布日期 |
2005.05.05 |
| 申请号 |
US20030696204 |
申请日期 |
2003.10.29 |
| 申请人 |
ZHOU YING;METZ MATTHEW V.;BRASK JUSTIN K.;BURGHARD JOHN;KUHN MARKUS;DATTA SUMAN;CHAU ROBERT S. |
发明人 |
ZHOU YING;METZ MATTHEW V.;BRASK JUSTIN K.;BURGHARD JOHN;KUHN MARKUS;DATTA SUMAN;CHAU ROBERT S. |
| 分类号 |
H01L21/316;(IPC1-7):H01L21/320;H01L21/31;H01L21/336;H01L21/469;H01L21/476;H01L21/76 |
主分类号 |
H01L21/316 |
| 代理机构 |
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代理人 |
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| 主权项 |
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