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发明名称
摘要
申请公布号	JPS4942858(U)	申请公布日期	1974.04.15
申请号	JP19720084382U	申请日期	1972.07.19
申请人		发明人
分类号	C30B25/14;C23C16/44;C23C16/455;H01L21/205;(IPC1-7):H01L21/205;B01J17/32;C23C11/00	主分类号	C30B25/14
代理机构		代理人
主权项
地址

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