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发明名称
PLASMA PROCESS METHOD FOR FILM COMPOSED MAINLY OF ALUMINUM
摘要
申请公布号
JPS54140478(A)
申请公布日期
1979.10.31
申请号
JP19780047784
申请日期
1978.04.24
申请人
HITACHI LTD
发明人
HIROBE YOSHIMICHI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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