| 摘要 |
PURPOSE:To prevent attachment of dirt to printed circuit boards and utilize vessels for circuit board effectively by partially separating No.1 and No.2 paths for transportation of printed circuit boards, and moving a vessel placed in a specified position of No.1 path to the specified position of No.2 path. CONSTITUTION:A holder supporting table of vertical motion type 71 an a holder 72 of attitude retained type 72 are furnished in the reticle drawout position P3. Each cassette 4 carried out of a library is placed on the supporting table 71 in the reticle drawout position P3, and the reticle 6 is taken out. When the reticle 6 is sent to the inspection stage, the emptied cassette 4 is sent to the accommodation position P8 through vertical replacement action with the supporting table 72, and in stead the table 72 will come to the reticle drawout position P3 to enable transport of cassettes which the next process requires. Accordingly the reticle 6 is transported while accommodated by cassette, from the library to drawout position P3 and from the accommodation position P8 to library. |
