发明名称 TURNTABLE DEVICE
摘要 <p>PURPOSE:To enable the turning alignment to be made with high precision within a simple constitution by a method wherein the free end of one elastic element as well as that of the other elastic element are respectively connected to a no-turning member and a turning member. CONSTITUTION:A no-turning member 81 and a turning member 82 are connected by elastic connecting members 88, 89 having at least a pair of elastic elements 90a, 90b. Accordingly, the turning displacement of the turning member 82 from the no-turning member 81 can be shared by a plurality of elastic elements. Consequently, the tension in the radial direction on the elastic elements 90a, 90b as well as the displacement in the same direction of the elastic elements 90a, 90b are diminished corresponding to the turning of the turning member 82 so that the turning member 82 may be turned by smaller force while showing large turning displacement. Through these procedures, the fine turning alignment can be performed with high precision.</p>
申请公布号 JPH02202031(A) 申请公布日期 1990.08.10
申请号 JP19890021906 申请日期 1989.01.31
申请人 NIPPON SEIKO KK 发明人 TAKUBO MINORU
分类号 B23Q1/00;G05D3/00;H01L21/027;H01L21/30;H01L21/68 主分类号 B23Q1/00
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