Micro-hydraulic device

摘要

A micro-hydraulic device includes an enclosure. The enclosure includes a substrate having a first surface and a second surface distal to the first surface. The enclosure further includes a chamber defined between the first surface and the second surface. The chamber is defined by a wall substantially from the first surface to the second surface. The enclosure includes a first flexible membrane sealingly connected to the first surface and disposed over the chamber; and a second flexible membrane sealingly connected to the second surface disposed over the chamber distal to the first flexible membrane. The device further includes an internal fluid retained within the enclosure and a rigid electrode fixed within the chamber having an aperture therein. A flexible electrode is disposed on the second flexible membrane opposite the rigid electrode.

主权项

1. A micro-hydraulic device, comprising:
an enclosure having:
a substrate having a first surface and a second surface distal to the first surface;a chamber defined between the first surface and the second surface defined by a wall substantially from the first surface to the second surface;a first flexible membrane sealingly connected to the first surface and disposed over the chamber; anda second flexible membrane sealingly connected to the second surface disposed over the chamber distal to the first flexible membrane; an internal fluid retained within the enclosure; a rigid electrode fixed within the chamber, the rigid electrode defining at least one aperture; and a flexible electrode disposed on the second flexible membrane opposite the rigid electrode.