CLEANING DEVICE FOR SQUARE SUBSTRATE,申请号JP19920042234-传众专利搜索

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发明名称	CLEANING DEVICE FOR SQUARE SUBSTRATE
摘要
申请公布号	JPH05217974(A)	申请公布日期	1993.08.27
申请号	JP19920042234	申请日期	1992.01.30
申请人	DAINIPPON SCREEN MFG CO LTD	发明人	KOUGAKI KOUICHI;KITAGAWA MASARU;YOSHINO HIROFUMI
分类号	B08B1/04;H01L21/304	主分类号	B08B1/04
代理机构		代理人
主权项
地址

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