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发明名称
CLAMP MECHANISM
摘要
申请公布号
JPH05290788(A)
申请公布日期
1993.11.05
申请号
JP19920121284
申请日期
1992.04.14
申请人
NISSIN ELECTRIC CO LTD
发明人
TATEMICHI JUNICHI;NUKAYAMA MASAAKI;ANDO YASUNORI
分类号
C23C14/50;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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