SUBSTRATE PROCESSING APPARATUS

摘要

A supply flow passage branches into a plurality of upstream flow passages. A plurality of discharge ports are respectively disposed at a plurality of positions located different distances apart from a rotational axis. A return flow passage is connected to an upstream flow passage. A downstream heater heats liquid flowing through the upstream flow passage. A downstream switching unit supplies the liquid, supplied to the plurality of upstream flow passages from the supply flow passage, to one among the plurality of discharge ports and one side of the return flow passage, selectively.