METHOD AND APPARATUS FOR FORMING A GRAPHENE PATTERN USING A DELAMINATION TECHNIQUE

摘要

The present invention relates to a graphene pattem forming method using a delamination technique employing ap01lymer stamp. The technique is adequate for forming a graphene pattem having a an arbitrary target pattem. According to the present invention, a portion of a graphene layer formed on a substrate is physically and selectively delaminated using the polymer stamp to simply and easily form a desired graphene pattem having a uniform line width on the substrate. Also, a porion of the graphene layer formed on the substrate is physically and selectively delaminated in a roll-to-roll manner using a rotating body stamp or by using a stamp having a large area to simply and easily form a desired graphene pattem having a uniform line width on the a substrate having a large area.