发明名称 |
METHODS AND APPARATUS FOR CLEANING OBJECTS IN A CHAMBER OF AN OPTICAL INSTRUMENT BY GENERATING REACTIVE IONS USING PHOTON RADIATION |
摘要 |
An optical instrument, including a chamber, an object exposed to an interior of the chamber, a source of low-pressure gas, the gas comprising at least one of low-pressure molecular hydrogen gas, low-pressure molecular oxygen and a low-pressure noble gas, the source of low pressure gas being fluidly coupled to the chamber, a low voltage source electrically coupled between the object and a remaining portion of the instrument that is exposed to the interior of the chamber so as to maintain the object at a low voltage relative to the remaining portion, and an EUV/VUV light source adapted to direct EUV/VUV light through the low pressure gas in the chamber onto the object. In such a system, when the EUV/VUV light source is activated ions of the low-pressure gas are formed and directed to the object. The ions may be ions of Hydrogen, Oxygen or a noble gas. |
申请公布号 |
EP2959263(A4) |
申请公布日期 |
2016.12.14 |
申请号 |
EP20140754678 |
申请日期 |
2014.02.24 |
申请人 |
Kla-Tencor Corporation;Sandia Corporation |
发明人 |
KLEBANOFF, Leonard, E.;DELGADO, Gildardo, R.;HOLLENSHEAD, Jeremy, T.;UMSTADTER, Karl, R.;STARODUB, Elena;ZHUANG, Guorong, V. |
分类号 |
G01B11/00;B08B7/00;G03F1/84;G03F7/20;H01L21/027 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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