发明名称 |
SILICON CARBIDE SUBSTRATE, SEMICONDUCTOR DEVICE AND METHODS FOR MANUFACTURING THEM |
摘要 |
A silicon carbide substrate capable of reducing on-resistance and improving yield of semiconductor devices is made of single-crystal silicon carbide, and sulfur atoms are present in one main surface at a ratio of not less than 60×1010 atoms/cm2 and not more than 2000×1010 atoms/cm2, and oxygen atoms are present in the one main surface at a ratio of not less than 3 at % and not more than 30 at %. |
申请公布号 |
US2016359007(A1) |
申请公布日期 |
2016.12.08 |
申请号 |
US201615239255 |
申请日期 |
2016.08.17 |
申请人 |
Sumitomo Electric Industries, Ltd. |
发明人 |
Ishibashi Keiji |
分类号 |
H01L29/36;H01L29/04;B28D5/04;H01L29/868;H01L29/66;H01L21/04;H01L29/16;H01L29/872 |
主分类号 |
H01L29/36 |
代理机构 |
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代理人 |
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主权项 |
1. A silicon carbide substrate in which a region including at least one main surface is made of single-crystal silicon carbide, the one main surface not being covered by any other semiconductor layer,
sulfur atoms being present in said one main surface at not less than 60×1010 atoms/cm2 and not more than 900×1010 atoms/cm2, oxygen atoms being present in said one main surface at not less than 3 at % and not more than 30 at % and a diameter of said silicon carbide substrate being not less than 125 mm. |
地址 |
Osaka JP |