| 摘要 |
PROBLEM TO BE SOLVED: To raise functionality of substrate transportation device, wherein a substrate is supported with a pair of supporting shafts for transportation. SOLUTION: A guide plate 12 which extends in a direction of allocation of a processing part (X-axis direction) is provided, and a movable member 16 which is movable along the guide plate 12 is provided. The movable member 16 is provided with a pair of fixed rails 24 extending in the X-axis direction, and it is movably attached with a pair of movable pieces 25, while being reciprocally driven by an air cylinder 26. Each movable piece 25 is provided with an arm 22 extending in a Y-axis direction, and the arm 22 is attached with a supporting claw 32. Then, with the pair of arms 22, a substrate W is supported along two facing sides of the substrate W via the supporting claw 32. |
